A High-Temperature, Low-Noise Readout ASIC for MEMS-Based Accelerometers

A High-Temperature, Low-Noise Readout ASIC for MEMS-Based Accelerometers

This paper presents the development and measurement results of a complementary metal oxide semiconductor (CMOS) readout application-specific integrated circuit (ASIC) for bulk-silicon microelectromechanical system (MEMS) accelerometers. The proposed ASIC converts the capacitance difference of the ME...

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Bibliographic Details
Main Authors: Min Qi, An-qiang Guo, Dong-hai Qiao
Format: Article
Language:English
Published: MDPI AG 2019-12-01
Series:Sensors
Subjects:
mems accelerometers
interface asic
high-temperature
low-noise
Online Access:https://www.mdpi.com/1424-8220/20/1/241

Internet

https://www.mdpi.com/1424-8220/20/1/241

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