Relationship between polishing performance and viscoelasticity of epoxy resin polishing pads

Polishing performances of glass using epoxy resin polishing pads from the aspect of their mechanical properties are described. Material removal rates are independent to the hardness of the epoxy resin pads. The different types of epoxy resin pads are produced by varying the composition of the resin...

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Bibliographic Details
Main Authors: Junji MURATA, Motomu INAZAWA, Yasuhiro TANI, Yu ZHANG
Format: Article
Language:Japanese
Published: The Japan Society of Mechanical Engineers 2014-09-01
Series:Nihon Kikai Gakkai ronbunshu
Subjects:
Online Access:https://www.jstage.jst.go.jp/article/transjsme/80/817/80_2014smm0253/_pdf/-char/en