Alleviating Class-Imbalance Data of Semiconductor Equipment Anomaly Detection Study

Alleviating Class-Imbalance Data of Semiconductor Equipment Anomaly Detection Study

Plasma-based semiconductor processing is highly sensitive, thus even minor changes in the procedure can have serious consequences. The monitoring and classification of these equipment anomalies can be performed using fault detection and classification (FDC). However, class imbalance in semiconductor...

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Bibliographic Details
Main Authors: Da Hoon Seol, Jeong Eun Choi, Chan Young Kim, Sang Jeen Hong
Format: Article
Language:English
Published: MDPI AG 2023-01-01
Series:Electronics
Subjects:
in situ monitoring
class imbalance
oversampling
undersampling
Online Access:https://www.mdpi.com/2079-9292/12/3/585

Internet

https://www.mdpi.com/2079-9292/12/3/585

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