Mathematical Physics Analysis of Nozzle Shaping at the Gas Outlet from the Aperture to the Differentially Pumped Chamber in Environmental Scanning Electron Microscopy (ESEM)
A combination of experimental measurement preparations using pressure and temperature sensors in conjunction with the theory of one-dimensional isentropic flow and mathematical physics analyses is presented as a tool for analysis in this paper. Furthermore, the subsequent development of a nozzle for...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-05-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/24/10/3243 |