Optimizing SiGe–SiO2 Visible–Short‐Wave Infrared Photoresponse by Modulating Interplay Between Strain and Defects Through Annealing

Optimizing SiGe–SiO2 Visible–Short‐Wave Infrared Photoresponse by Modulating Interplay Between Strain and Defects Through Annealing

SiGe‐SiO2‐based structures present high interest for their high photosensitivity from visible to short‐wavelength infrared. Herein, two postdeposition annealing procedures, that is, rapid thermal annealing (RTA) and rapid‐like furnace annealing (FA), are compared. Both RTA and FA are performed at 60...

詳細記述

書誌詳細
主要な著者: Muhammad Taha Sultan, Ionel Stavarache, Andrei Manolescu, Unnar Bjarni Arnalds, Valentin Serban Teodorescu, Halldor Gudfinnur Svavarsson, Snorri Ingvarsson, Magdalena Lidia Ciurea
フォーマット: 論文
言語:English
出版事項: Wiley-VCH 2024-08-01
シリーズ:Advanced Photonics Research
主題:
magnetron sputtering
photocurrents
rapid‐like furnace annealing
SiGe nanocrystals
stress field and defects
structure and morphologies
オンライン･アクセス:https://doi.org/10.1002/adpr.202300316

インターネット

https://doi.org/10.1002/adpr.202300316

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