Impact of non-ferroelectric phases on switching dynamics in epitaxial ferroelectric Hf0.5Zr0.5O2 films
Determining the switching speed and mechanisms in ferroelectric HfO2 is essential for applications. Switching dynamics in orthorhombic epitaxial ferroelectric Hf0.5Zr0.5O2 films with either significant or negligible presence of monoclinic paraelectric phase is characterized. Switching spectroscopy r...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2022-03-01
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Series: | APL Materials |
Online Access: | http://dx.doi.org/10.1063/5.0083661 |