Engineering high aspect-ratio silicon nanostructures
Large-area high density vertical silicon nanowire arrays are fabricated by metal-assisted chemical etching. Two-dimensional silica colloidal crystal template or laser interference lithography are used to create gold metal nanohole arrays on a silicon substrate, which enables to precisely control th...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Al-Farabi Kazakh National University
2023-11-01
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| Series: | Physical Sciences and Technology |
| Online Access: | https://phst.kaznu.kz/index.php/journal/article/view/344 |