Distribution of elastic stress as a function of temperature in a 2-μm redistribution line of Cu measured with X-ray nanodiffraction analysis

Distribution of elastic stress as a function of temperature in a 2-μm redistribution line of Cu measured with X-ray nanodiffraction analysis

We investigated the lattice strain of nano-twinned Cu (nt-Cu) and regular Cu redistribution lines (RDLs) at 215, 300, 375 and 434 K using x-ray nanodiffraction; this technique has spatial resolution 100 nm. We found that the largest thermal strain or stress appeared at the corner of a Cu line at whi...

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Bibliographic Details
Main Authors: Wei-You Hsu, I-Hsin Tseng, Ching-Yu Chiang, K.N. Tu, Chih Chen
Format: Article
Language:English
Published: Elsevier 2022-09-01
Series:Journal of Materials Research and Technology
Subjects:
Synchrotron radiation
X-ray nanodiffraction
Thermal strain map
Redistribution lines
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785422012832

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http://www.sciencedirect.com/science/article/pii/S2238785422012832

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