Smooth or not: Robust fused silica micro-components by femtosecond-laser-assisted etching
Recent progress in manufacturing now enables the efficient fabrication of complex oxide-glass components at the micrometer– to sub-micrometer scale. This benefits both the industry and fundamental research as such miniature glass parts have numerous applications. However, at these length-scales, the...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-06-01
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| Series: | Materials & Design |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127521002239 |