Influence of Deposition Method on the Structural and Optical Properties of Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub>

Influence of Deposition Method on the Structural and Optical Properties of Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub>

Ge2Sb2Te5 (GST-225) is a chalcogenide material with applications in nonvolatile memories. However, chalcogenide material properties are dependent on the deposition technique. GST-225 thin films were prepared using three deposition methods: magnetron sputtering (MS), pulsed laser deposition (PLD) and...

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Bibliographic Details
Main Authors: Iosif-Daniel Simandan, Florinel Sava, Angel-Theodor Buruiana, Aurelian-Catalin Galca, Nicu Becherescu, Ion Burducea, Claudia Mihai, Alin Velea
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Materials
Subjects:
magnetron sputtering
pulsed laser deposition
Ge2Sb2Te5
Raman spectroscopy
spectroscopic ellipsometry
band gap
Online Access:https://www.mdpi.com/1996-1944/14/13/3663

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https://www.mdpi.com/1996-1944/14/13/3663

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