Research on a Method to Improve the Temperature Performance of an All-Silicon Accelerometer

Research on a Method to Improve the Temperature Performance of an All-Silicon Accelerometer

This paper presents a novel method for the performance of an all-silicon accelerometer by adjusting the ratio of the Si-SiO<sub>2</sub> bonding area, and the Au-Si bonding area in the anchor zone, with the aim of eliminating stress in the anchor region. The study includes the development...

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Bibliographic Details
Main Authors: Guowen Liu, Yu Liu, Xiao Ma, Xuefeng Wang, Xudong Zheng, Zhonghe Jin
Format: Article
Language:English
Published: MDPI AG 2023-04-01
Series:Micromachines
Subjects:
MEMS accelerometer
response signal
anchor zone
stress cancellation
Online Access:https://www.mdpi.com/2072-666X/14/4/869

Internet

https://www.mdpi.com/2072-666X/14/4/869

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