A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling
<p>Abstract</p> <p>We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as <it>nanomilling</it>. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectr...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2010-01-01
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| Series: | Nanoscale Research Letters |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1007/s11671-010-9653-7 |