A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling
<p>Abstract</p> <p>We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as <it>nanomilling</it>. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectr...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2010-01-01
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| Series: | Nanoscale Research Letters |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1007/s11671-010-9653-7 |
| Summary: | <p>Abstract</p> <p>We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as <it>nanomilling</it>. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectric actuator is used as the nanotool. By circumventing the high-compliance AFM beam and directly attaching the tip onto the piezoelectric actuator, a high-stiffness arrangement is realized. The feeding motions and depth prescription are provided by a nano-positioning stage. It is shown that nanomilling is capable of removing the material in the form of long curled chips, indicating shearing as the dominant material removal mechanism. Feature-size and shape control capabilities of the method are demonstrated.</p> |
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| ISSN: | 1931-7573 1556-276X |