A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling
<p>Abstract</p> <p>We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as <it>nanomilling</it>. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectr...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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SpringerOpen
2010-01-01
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| Series: | Nanoscale Research Letters |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1007/s11671-010-9653-7 |
| _version_ | 1797722253295616000 |
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| author | Gozen B Ozdoganlar O |
| author_facet | Gozen B Ozdoganlar O |
| author_sort | Gozen B |
| collection | DOAJ |
| description | <p>Abstract</p> <p>We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as <it>nanomilling</it>. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectric actuator is used as the nanotool. By circumventing the high-compliance AFM beam and directly attaching the tip onto the piezoelectric actuator, a high-stiffness arrangement is realized. The feeding motions and depth prescription are provided by a nano-positioning stage. It is shown that nanomilling is capable of removing the material in the form of long curled chips, indicating shearing as the dominant material removal mechanism. Feature-size and shape control capabilities of the method are demonstrated.</p> |
| first_indexed | 2024-03-12T09:44:54Z |
| format | Article |
| id | doaj.art-37916f15034641b09518800a3cdb8214 |
| institution | Directory Open Access Journal |
| issn | 1931-7573 1556-276X |
| language | English |
| last_indexed | 2024-03-12T09:44:54Z |
| publishDate | 2010-01-01 |
| publisher | SpringerOpen |
| record_format | Article |
| series | Nanoscale Research Letters |
| spelling | doaj.art-37916f15034641b09518800a3cdb82142023-09-02T12:56:23ZengSpringerOpenNanoscale Research Letters1931-75731556-276X2010-01-015914031407A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: NanomillingGozen BOzdoganlar O<p>Abstract</p> <p>We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as <it>nanomilling</it>. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectric actuator is used as the nanotool. By circumventing the high-compliance AFM beam and directly attaching the tip onto the piezoelectric actuator, a high-stiffness arrangement is realized. The feeding motions and depth prescription are provided by a nano-positioning stage. It is shown that nanomilling is capable of removing the material in the form of long curled chips, indicating shearing as the dominant material removal mechanism. Feature-size and shape control capabilities of the method are demonstrated.</p>http://dx.doi.org/10.1007/s11671-010-9653-7NanomillingAFM probeNano-manufacturingNano-machining |
| spellingShingle | Gozen B Ozdoganlar O A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling Nanoscale Research Letters Nanomilling AFM probe Nano-manufacturing Nano-machining |
| title | A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling |
| title_full | A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling |
| title_fullStr | A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling |
| title_full_unstemmed | A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling |
| title_short | A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling |
| title_sort | rotating tip based mechanical nano manufacturing process nanomilling |
| topic | Nanomilling AFM probe Nano-manufacturing Nano-machining |
| url | http://dx.doi.org/10.1007/s11671-010-9653-7 |
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