Magnetically preloaded aerostatic guideway for high speed nanometer positioning
Demands for nanometer positioning with a high resolution and a long stroke have increased in a variety of industries. Performance of guide elements is one of the most important issues for realizing such positioning systems. In general, an ultra-precision positioning system has aerostatic guideway wh...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2014-10-01
|
| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/8/4/8_2014jamdsm0054/_pdf/-char/en |