Hybrid Integration of Photonic Crystal Membrane Lasers via Postprocess Bonding
Photonic crystal (PhC) lasers in InGaAsP membranes are bonded after fabrication to a sapphire substrate. The processed devices are held to the sapphire by van der Waals forces and do not require a high temperature anneal. PhC H2 defect cavity devices are found to lase continuous wave and line defect...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2011-01-01
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Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/5742961/ |