UV Nanoimprint Lithography—Impact of Coating Techniques on Pattern Quality
In this work, three different coating techniques are compared and their applicability for ultraviolet nanoimprint lithography (UV-NIL) is investigated. As UV-NIL is considered a suitable volume manufacturing production solution for various emerging applications, it is mandatory to consider environme...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-03-01
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| Series: | Nanomanufacturing |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2673-687X/4/1/5 |