Development of Wireless and Passive SAW Temperature Sensor with Very High Accuracy
A surface acoustic wave (SAW) temperature sensor with high accuracy was developed and wirelessly characterized in this work. The sensing chip with reflective delay line pattern was simulated using typical coupling of modes (COM) model and prepared by the standard photolithographic technique. Sharp r...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-08-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/16/7422 |