Onset of vertical threading dislocations in Si1−xGex/Si (001) at a critical Ge concentration
We show that the Ge concentration in Si1−xGex alloys grown under strong out-of-equilibrium conditions determines the character of the population of threading dislocations (TDs). Above a critical value x ∼ 0.25 vertical TDs dominate over the common slanted ones. This is demonstrated by exploiting a s...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2013-11-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/1.4829976 |