Structural, dielectric and ferroelectric characterization of PZT thin films
In this work ferroelectric thin films of PZT were prepared by the oxide precursor method, deposited on Pt/Si substrate. Films of 0.5 mm average thickness were obtained. Electrical and ferroelectric characterization were carried out in these films. The measured value of the dielectric constant for fi...
| Hauptverfasser: | , |
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| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Associação Brasileira de Cerâmica
1999-01-01
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| Schriftenreihe: | Cerâmica |
| Schlagworte: | |
| Online Zugang: | http://www.scielo.br/scielo.php?script=sci_arttext&pid=S0366-69131999000200010 |