High-Temperature Ferroelectric Behavior of Al<sub>0.7</sub>Sc<sub>0.3</sub>N

High-Temperature Ferroelectric Behavior of Al<sub>0.7</sub>Sc<sub>0.3</sub>N

Currently, there is a lack of nonvolatile memory (NVM) technology that can operate continuously at temperatures > 200 °C. While ferroelectric NVM has previously demonstrated long polarization retention and >10<sup>13</sup> read/write cycles at room temperature, the largest hurdle c...

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Bibliographic Details
Main Authors: Daniel Drury, Keisuke Yazawa, Andriy Zakutayev, Brendan Hanrahan, Geoff Brennecka
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Micromachines
Subjects:
AlScN
ferroelectric
high temperature
nonvolatile memory
retention
fatigue
Online Access:https://www.mdpi.com/2072-666X/13/6/887

Internet

https://www.mdpi.com/2072-666X/13/6/887

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