A motion characteristics modeled angular position sensor by nonlinear transfer of differential capacitance for miniaturized scanning mirrors
Abstract In this paper, an angular position sensor (APS) designed for a resonant miniaturized scanning mirror (M-SM) is presented. The APS operates based on the principle of differential variable capacitance, significantly expanding the detectable bandwidth from a few hertz to several kilohertz. By...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2023-11-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-023-00619-8 |