Resonant Frequency Characteristics of a SAW Device Attached to Resonating Micropillars

Recently we reported experimental and simulation results on an increase in resonance frequency of a SAW resonator caused by mass loading of micropillars made of SU-8, attached normal to the surface of the resonator. We concluded that SAW resonator and the SU-8 micropillars in unison form a system of...

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Bibliographic Details
Main Authors: Roy Paily Palathinkal, N. Ramakrishnan, Harshal B. Nemade
Format: Article
Language:English
Published: MDPI AG 2012-03-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/12/4/3789/