Ultrathin quasi-2D amorphous carbon dielectric prepared from solution precursor for nanoelectronics
Abstract Materials keeping thickness in atomic scale but extending primarily in lateral dimensions offer properties attractive for many emerging applications. However, compared to crystalline counterparts, synthesis of atomically thin films in the highly disordered amorphous form, which avoids nonun...
Main Authors: | , , , , , , , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2023-12-01
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Series: | Communications Engineering |
Online Access: | https://doi.org/10.1038/s44172-023-00141-9 |