A Temperature Drift Suppression Method of Mode-Matched MEMS Gyroscope Based on a Combination of Mode Reversal and Multiple Regression
In recent years, the application prospects of high-precision MEMS gyroscopes have been shown to be very broad, but the large temperature drift of MEMS gyroscopes limits their application in complex temperature environments. In response to this, we propose a method that combines mode reversal and rea...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-09-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/13/10/1557 |