The Impact of Nozzle Opening Thickness on Flow Characteristics and Primary Electron Beam Scattering in an Environmental Scanning Electron Microscope

The Impact of Nozzle Opening Thickness on Flow Characteristics and Primary Electron Beam Scattering in an Environmental Scanning Electron Microscope

This paper describes the methodology of combining experimental measurements with mathematical–physics analyses in the investigation of flow in the aperture and nozzle. The aperture and nozzle separate the differentially pumped chamber from the specimen chamber in an environmental scanning electron m...

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Bibliographic Details
Main Authors: Jiří Maxa, Pavla Šabacká, Jan Mazal, Vilém Neděla, Tomáš Binar, Petr Bača, Jaroslav Talár, Robert Bayer, Pavel Čudek
Format: Article
Language:English
Published: MDPI AG 2024-03-01
Series:Sensors
Subjects:
Ansys Fluent
ESEM
critical flow
nozzle
CFD
numerical simulation
Online Access:https://www.mdpi.com/1424-8220/24/7/2166

Internet

https://www.mdpi.com/1424-8220/24/7/2166

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