Optimised magnetron sputtering method for the deposition of indium tin oxide layers
The article presents the method of magnetron sputtering for the deposition of conductive emitter coatings in semiconductor structures. The layers were applied to a silicon substrate. For optical investigations, borosilicate glasses were used. The obtained layers were subjected to both optical and el...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Polish Academy of Sciences
2021-11-01
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| Series: | Bulletin of the Polish Academy of Sciences: Technical Sciences |
| Subjects: | |
| Online Access: | https://journals.pan.pl/Content/121318/PDF/Z_29_02431_Bpast.No.69(6)_OK.pdf |