Investigation of optical and electrophysical properties of Mn4Si7 coatings of different thickness
Studies of Mn4Si7 coatings of different thicknesses have shown that magnetron deposition practically does not change the composition of the coating in comparison with the composition of the target. The technology and basic modes of creating the necessary targets for a magnetron sputtering device are...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Vasyl Stefanyk Precarpathian National University
2024-06-01
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| Series: | Фізика і хімія твердого тіла |
| Subjects: | |
| Online Access: | https://journals.pnu.edu.ua/index.php/pcss/article/view/7352 |