Micro-texturing into DLC/diamond coated molds and dies via high density oxygen plasma etching
Diamond-Like Carbon (DLC) and Chemical Vapor Deposition (CVD)-diamond films have been widely utilized not only as a hard protective coating for molds and dies but also as a functional substrate for bio-MEMS/NEMS. Micro-texturing into these hard coated molds and dies provides a productive tool to dup...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2015-01-01
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| Series: | Manufacturing Review |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1051/mfreview/2015015 |