ZnO Thin Films Growth Optimization for Piezoelectric Application

ZnO Thin Films Growth Optimization for Piezoelectric Application

The piezoelectric response of ZnO thin films in heterostructure-based devices is strictly related to their structure and morphology. We optimize the fabrication of piezoelectric ZnO to reduce its surface roughness, improving the crystalline quality, taking into consideration the role of the metal el...

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Bibliographic Details
Main Authors: Vincent Polewczyk, Riccardo Magrin Maffei, Giovanni Vinai, Matteo Lo Cicero, Stefano Prato, Pietro Capaldo, Simone Dal Zilio, Alessandro di Bona, Guido Paolicelli, Andrea Mescola, Sergio D’Addato, Piero Torelli, Stefania Benedetti
Format: Article
Language:English
Published: MDPI AG 2021-09-01
Series:Sensors
Subjects:
surface roughness
piezoelectricity
crystallinity
magnetron sputtering
metal electrodes
ZnO
Online Access:https://www.mdpi.com/1424-8220/21/18/6114

Internet

https://www.mdpi.com/1424-8220/21/18/6114

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