MEMS Flow Sensors Based on Self-Heated aGe-Thermistors in a Wheatstone Bridge

MEMS Flow Sensors Based on Self-Heated aGe-Thermistors in a Wheatstone Bridge

A thermal flow transduction method combining the advantages of calorimetric and hot-film transduction principles is developed and analyzed by Finite Element Method (FEM) simulations and confirmed experimentally. The analyses include electrothermal feedback effects of current driven NTC thermistors....

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Bibliographic Details
Main Authors: Almir Talic, Samir Cerimovic, Roman Beigelbeck, Franz Kohl, Thilo Sauter, Franz Keplinger
Format: Article
Language:English
Published: MDPI AG 2015-04-01
Series:Sensors
Subjects:
flow sensor
Finite Element Method
Wheatstone bridge configuration
Online Access:http://www.mdpi.com/1424-8220/15/5/10004

Internet

http://www.mdpi.com/1424-8220/15/5/10004

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