MEMS Flow Sensors Based on Self-Heated aGe-Thermistors in a Wheatstone Bridge

MEMS Flow Sensors Based on Self-Heated aGe-Thermistors in a Wheatstone Bridge

A thermal flow transduction method combining the advantages of calorimetric and hot-film transduction principles is developed and analyzed by Finite Element Method (FEM) simulations and confirmed experimentally. The analyses include electrothermal feedback effects of current driven NTC thermistors....

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Bibliographic Details
Main Authors:	Almir Talic, Samir Cerimovic, Roman Beigelbeck, Franz Kohl, Thilo Sauter, Franz Keplinger
Format:	Article
Language:	English
Published:	MDPI AG 2015-04-01
Series:	Sensors
Subjects:	flow sensor Finite Element Method Wheatstone bridge configuration
Online Access:	http://www.mdpi.com/1424-8220/15/5/10004

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