A Review on Coupled Bulk Acoustic Wave MEMS Resonators

A Review on Coupled Bulk Acoustic Wave MEMS Resonators

With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and...

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Detalhes bibliográficos
Principais autores: Linlin Wang, Chen Wang, Yuan Wang, Aojie Quan, Masoumeh Keshavarz, Bernardo Pereira Madeira, Hemin Zhang, Chenxi Wang, Michael Kraft
Formato: Artigo
Idioma:English
Publicado em: MDPI AG 2022-05-01
coleção:Sensors
Assuntos:
Micro-Electro-Mechanical System (MEMS)
bulk acoustic wave (BAW)
coupled resonators
sensing theory
transduction mechanism
Acesso em linha:https://www.mdpi.com/1424-8220/22/10/3857

Internet

https://www.mdpi.com/1424-8220/22/10/3857

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