A Review on Coupled Bulk Acoustic Wave MEMS Resonators
With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and...
| Κύριοι συγγραφείς: | , , , , , , , , |
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| Μορφή: | Άρθρο |
| Γλώσσα: | English |
| Έκδοση: |
MDPI AG
2022-05-01
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| Σειρά: | Sensors |
| Θέματα: | |
| Διαθέσιμο Online: | https://www.mdpi.com/1424-8220/22/10/3857 |