Flexible BioMEMS devices enabled by micromachining of plasma-polymerized fluorocarbon

Flexible BioMEMS devices enabled by micromachining of plasma-polymerized fluorocarbon

Microelectromechanical systems for biological purposes (BioMEMS) have shown huge potential for diagnostics, medical treatment or even augmenting certain body functions in humans. This is enabled by the high level of integration, manufacturing precision and high throughput of fabrication techniques i...

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Bibliographic Details
Main Authors: Bingdong Chang, Xiyuan Liu, Nicolas Bertram, Anpan Han
Format: Article
Language:English
Published: Elsevier 2023-06-01
Series:Micro and Nano Engineering
Subjects:
Flexible devices
BioMEMS
Plasma-polymerized fluorocarbon (PPFC)
Plasma process
Microelectrode arrays (MEAs)
Online Access:http://www.sciencedirect.com/science/article/pii/S2590007223000072

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http://www.sciencedirect.com/science/article/pii/S2590007223000072

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