Flexible BioMEMS devices enabled by micromachining of plasma-polymerized fluorocarbon
Microelectromechanical systems for biological purposes (BioMEMS) have shown huge potential for diagnostics, medical treatment or even augmenting certain body functions in humans. This is enabled by the high level of integration, manufacturing precision and high throughput of fabrication techniques i...
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| Format: | Article |
| Language: | English |
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Elsevier
2023-06-01
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| Series: | Micro and Nano Engineering |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590007223000072 |
| _version_ | 1797798656514981888 |
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| author | Bingdong Chang Xiyuan Liu Nicolas Bertram Anpan Han |
| author_facet | Bingdong Chang Xiyuan Liu Nicolas Bertram Anpan Han |
| author_sort | Bingdong Chang |
| collection | DOAJ |
| description | Microelectromechanical systems for biological purposes (BioMEMS) have shown huge potential for diagnostics, medical treatment or even augmenting certain body functions in humans. This is enabled by the high level of integration, manufacturing precision and high throughput of fabrication techniques in sophisticated semiconductor industries. For minimally invasive devices, mechanically compliable polymeric materials are widely used, like SU-8, polyimide and parylene C, which have good biocompatibility but are difficult to be integrated with standard fabrication processes in semiconductor industries, therefore limiting the production throughput and complexity of device architecture. In this work we present various micromachining techniques of plasma-polymerized fluorocarbon (PPFC), which is a feasible polymeric material acquirable by plasma etching systems. Due to its excellent chemical stability, PPFC is compatible with standard fabrication techniques like plasma etching, photolithography and deposition of thin metal films, which enable the functionalization of PPFC-based platforms for BioMEMS devices. The processing parameters have been discussed, and structures like high aspect ratio nanopillars and PPFC membranes are demonstrated. As a proof of concept, flexible free-standing microelectrode arrays are fabricated. Since PPFC resembles the physiochemical properties of fluorocarbon, which is recognized by USP Class VI standards, we expect PPFC-based platform to be a strong candidate for development of various BioMEMS devices, like biological implants, tissue engineering, neuroprosthetic electrodes, brain-machine interfaces, etc. |
| first_indexed | 2024-03-13T04:08:08Z |
| format | Article |
| id | doaj.art-39a4c89afbbb4bf39ea0216f04d025f5 |
| institution | Directory Open Access Journal |
| issn | 2590-0072 |
| language | English |
| last_indexed | 2024-03-13T04:08:08Z |
| publishDate | 2023-06-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Micro and Nano Engineering |
| spelling | doaj.art-39a4c89afbbb4bf39ea0216f04d025f52023-06-21T06:58:51ZengElsevierMicro and Nano Engineering2590-00722023-06-0119100177Flexible BioMEMS devices enabled by micromachining of plasma-polymerized fluorocarbonBingdong Chang0Xiyuan Liu1Nicolas Bertram2Anpan Han3DTU Construct, Department of Civil and Mechanical Engineering, Technical University of Denmark, Nils Koppels Allé, 2800 Kongens Lyngby, Denmark; Corresponding author.DTU Construct, Department of Civil and Mechanical Engineering, Technical University of Denmark, Nils Koppels Allé, 2800 Kongens Lyngby, DenmarkDTU Construct, Department of Civil and Mechanical Engineering, Technical University of Denmark, Nils Koppels Allé, 2800 Kongens Lyngby, Denmark; Department of Neuroscience, University of Copenhagen, Copenhagen, 2100, DenmarkDTU Construct, Department of Civil and Mechanical Engineering, Technical University of Denmark, Nils Koppels Allé, 2800 Kongens Lyngby, DenmarkMicroelectromechanical systems for biological purposes (BioMEMS) have shown huge potential for diagnostics, medical treatment or even augmenting certain body functions in humans. This is enabled by the high level of integration, manufacturing precision and high throughput of fabrication techniques in sophisticated semiconductor industries. For minimally invasive devices, mechanically compliable polymeric materials are widely used, like SU-8, polyimide and parylene C, which have good biocompatibility but are difficult to be integrated with standard fabrication processes in semiconductor industries, therefore limiting the production throughput and complexity of device architecture. In this work we present various micromachining techniques of plasma-polymerized fluorocarbon (PPFC), which is a feasible polymeric material acquirable by plasma etching systems. Due to its excellent chemical stability, PPFC is compatible with standard fabrication techniques like plasma etching, photolithography and deposition of thin metal films, which enable the functionalization of PPFC-based platforms for BioMEMS devices. The processing parameters have been discussed, and structures like high aspect ratio nanopillars and PPFC membranes are demonstrated. As a proof of concept, flexible free-standing microelectrode arrays are fabricated. Since PPFC resembles the physiochemical properties of fluorocarbon, which is recognized by USP Class VI standards, we expect PPFC-based platform to be a strong candidate for development of various BioMEMS devices, like biological implants, tissue engineering, neuroprosthetic electrodes, brain-machine interfaces, etc.http://www.sciencedirect.com/science/article/pii/S2590007223000072Flexible devicesBioMEMSPlasma-polymerized fluorocarbon (PPFC)Plasma processMicroelectrode arrays (MEAs) |
| spellingShingle | Bingdong Chang Xiyuan Liu Nicolas Bertram Anpan Han Flexible BioMEMS devices enabled by micromachining of plasma-polymerized fluorocarbon Micro and Nano Engineering Flexible devices BioMEMS Plasma-polymerized fluorocarbon (PPFC) Plasma process Microelectrode arrays (MEAs) |
| title | Flexible BioMEMS devices enabled by micromachining of plasma-polymerized fluorocarbon |
| title_full | Flexible BioMEMS devices enabled by micromachining of plasma-polymerized fluorocarbon |
| title_fullStr | Flexible BioMEMS devices enabled by micromachining of plasma-polymerized fluorocarbon |
| title_full_unstemmed | Flexible BioMEMS devices enabled by micromachining of plasma-polymerized fluorocarbon |
| title_short | Flexible BioMEMS devices enabled by micromachining of plasma-polymerized fluorocarbon |
| title_sort | flexible biomems devices enabled by micromachining of plasma polymerized fluorocarbon |
| topic | Flexible devices BioMEMS Plasma-polymerized fluorocarbon (PPFC) Plasma process Microelectrode arrays (MEAs) |
| url | http://www.sciencedirect.com/science/article/pii/S2590007223000072 |
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