Resistive Switching and Synaptic Characteristics in ZnO/TaON-Based RRAM for Neuromorphic System

We fabricated an ITO/ZnO/TaON/TaN device as nonvolatile memory (NVM) with resistive switching for complementary metal-oxide-semiconductor (CMOS) compatibility. It is appropriate for the age of big data, which demands high speed and capacity. We produced a TaON layer by depositing a ZnO layer on a Ta...

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Main Authors: Inho Oh, Juyeong Pyo, Sungjun Kim
Format: Article
Language:English
Published: MDPI AG 2022-06-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/12/13/2185
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author Inho Oh
Juyeong Pyo
Sungjun Kim
author_facet Inho Oh
Juyeong Pyo
Sungjun Kim
author_sort Inho Oh
collection DOAJ
description We fabricated an ITO/ZnO/TaON/TaN device as nonvolatile memory (NVM) with resistive switching for complementary metal-oxide-semiconductor (CMOS) compatibility. It is appropriate for the age of big data, which demands high speed and capacity. We produced a TaON layer by depositing a ZnO layer on a TaN layer using an oxygen-reactive radio frequency (RF) sputtering system. The bi-layer formation of ZnO and TaON interferes with the filament rupture after the forming process and then raises the current level slightly. The current levels were divided into high- and low-compliance modes. The retention, endurance, and pulse conductance were verified with a neuromorphic device. This device was stable and less consumed when it was in low mode rather than high mode.
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spelling doaj.art-3a34c66cb9b344c0868cb2a01ddce05e2023-11-30T22:16:16ZengMDPI AGNanomaterials2079-49912022-06-011213218510.3390/nano12132185Resistive Switching and Synaptic Characteristics in ZnO/TaON-Based RRAM for Neuromorphic SystemInho Oh0Juyeong Pyo1Sungjun Kim2Division of Electronics and Electrical Engineering, Dongguk University, Seoul 04620, KoreaDivision of Electronics and Electrical Engineering, Dongguk University, Seoul 04620, KoreaDivision of Electronics and Electrical Engineering, Dongguk University, Seoul 04620, KoreaWe fabricated an ITO/ZnO/TaON/TaN device as nonvolatile memory (NVM) with resistive switching for complementary metal-oxide-semiconductor (CMOS) compatibility. It is appropriate for the age of big data, which demands high speed and capacity. We produced a TaON layer by depositing a ZnO layer on a TaN layer using an oxygen-reactive radio frequency (RF) sputtering system. The bi-layer formation of ZnO and TaON interferes with the filament rupture after the forming process and then raises the current level slightly. The current levels were divided into high- and low-compliance modes. The retention, endurance, and pulse conductance were verified with a neuromorphic device. This device was stable and less consumed when it was in low mode rather than high mode.https://www.mdpi.com/2079-4991/12/13/2185memristorresistive switchinglow and high currentbilayerZnOTaON
spellingShingle Inho Oh
Juyeong Pyo
Sungjun Kim
Resistive Switching and Synaptic Characteristics in ZnO/TaON-Based RRAM for Neuromorphic System
Nanomaterials
memristor
resistive switching
low and high current
bilayer
ZnO
TaON
title Resistive Switching and Synaptic Characteristics in ZnO/TaON-Based RRAM for Neuromorphic System
title_full Resistive Switching and Synaptic Characteristics in ZnO/TaON-Based RRAM for Neuromorphic System
title_fullStr Resistive Switching and Synaptic Characteristics in ZnO/TaON-Based RRAM for Neuromorphic System
title_full_unstemmed Resistive Switching and Synaptic Characteristics in ZnO/TaON-Based RRAM for Neuromorphic System
title_short Resistive Switching and Synaptic Characteristics in ZnO/TaON-Based RRAM for Neuromorphic System
title_sort resistive switching and synaptic characteristics in zno taon based rram for neuromorphic system
topic memristor
resistive switching
low and high current
bilayer
ZnO
TaON
url https://www.mdpi.com/2079-4991/12/13/2185
work_keys_str_mv AT inhooh resistiveswitchingandsynapticcharacteristicsinznotaonbasedrramforneuromorphicsystem
AT juyeongpyo resistiveswitchingandsynapticcharacteristicsinznotaonbasedrramforneuromorphicsystem
AT sungjunkim resistiveswitchingandsynapticcharacteristicsinznotaonbasedrramforneuromorphicsystem