Design, Fabrication, Structure Optimization and Pressure Sensing Demonstration of COC Piezoelectret Sensor and Sensor Array

Design, Fabrication, Structure Optimization and Pressure Sensing Demonstration of COC Piezoelectret Sensor and Sensor Array

This study reported on the design and fabrication of a pseudo-piezoelectric material (piezoelectret) from cyclic olefin copolymer (COC) based on a micropillar structure. The fabrication feasibility of such structure was explored and piezoelectret with the good piezoelectric activity (characterized b...

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Bibliographic Details
Main Authors: Hui Wang, Xiaolin Wang, Matthew Wadsworth, Mohammad Faisal Ahmed, Zhe Liu, Changchun Zeng
Format: Article
Language:English
Published: MDPI AG 2022-07-01
Series:Micromachines
Subjects:
COC piezoelectrets
piezoelectric coefficient
response surface method
pressure mapping
Online Access:https://www.mdpi.com/2072-666X/13/8/1177

Internet

https://www.mdpi.com/2072-666X/13/8/1177

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