Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm

Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm

This work deals with various investigations into the accuracy of a newly developed planar nanopositioning machine. This machine, called Nanofabrication Machine 100 (NFM-100), has a positioning range of 100 mm in diameter. To determine the precision, various movement scenarios are performed with the...

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Bibliographic Details
Main Authors: Jaqueline Stauffenberg, Ingo Ortlepp, Johannes Belkner, Denis Dontsov, Enrico Langlotz, Steffen Hesse, Ivo Rangelow, Eberhard Manske
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Applied Sciences
Subjects:
nanopositioning machine
planar direct drive
sub-nanometre precision
macroscopic working range
high speed
Online Access:https://www.mdpi.com/2076-3417/12/15/7843

Internet

https://www.mdpi.com/2076-3417/12/15/7843

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