Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm
This work deals with various investigations into the accuracy of a newly developed planar nanopositioning machine. This machine, called Nanofabrication Machine 100 (NFM-100), has a positioning range of 100 mm in diameter. To determine the precision, various movement scenarios are performed with the...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-08-01
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| Series: | Applied Sciences |
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| Online Access: | https://www.mdpi.com/2076-3417/12/15/7843 |
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| author | Jaqueline Stauffenberg Ingo Ortlepp Johannes Belkner Denis Dontsov Enrico Langlotz Steffen Hesse Ivo Rangelow Eberhard Manske |
| author_facet | Jaqueline Stauffenberg Ingo Ortlepp Johannes Belkner Denis Dontsov Enrico Langlotz Steffen Hesse Ivo Rangelow Eberhard Manske |
| author_sort | Jaqueline Stauffenberg |
| collection | DOAJ |
| description | This work deals with various investigations into the accuracy of a newly developed planar nanopositioning machine. This machine, called Nanofabrication Machine 100 (NFM-100), has a positioning range of 100 mm in diameter. To determine the precision, various movement scenarios are performed with the machine table, and the trajectory deviation from the set trajectory is determined. In particular, the focus is on high velocities of up to 20 mm/s. Even at high speeds in the range of several millimetres per second, this machine can impress with its performance and only has a deviation in the nanometre range. |
| first_indexed | 2024-03-09T10:09:16Z |
| format | Article |
| id | doaj.art-3a99003d965c4565a9acc24ad6e44010 |
| institution | Directory Open Access Journal |
| issn | 2076-3417 |
| language | English |
| last_indexed | 2024-03-09T10:09:16Z |
| publishDate | 2022-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Applied Sciences |
| spelling | doaj.art-3a99003d965c4565a9acc24ad6e440102023-12-01T22:51:11ZengMDPI AGApplied Sciences2076-34172022-08-011215784310.3390/app12157843Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mmJaqueline Stauffenberg0Ingo Ortlepp1Johannes Belkner2Denis Dontsov3Enrico Langlotz4Steffen Hesse5Ivo Rangelow6Eberhard Manske7Production and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Gustav-Kirchhoff-Straße 1, 98693 Ilmenau, GermanyProduction and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Gustav-Kirchhoff-Straße 1, 98693 Ilmenau, GermanyProduction and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Gustav-Kirchhoff-Straße 1, 98693 Ilmenau, GermanySIOS Meßtechnik GmbH, Am Vogelherd 46, 98693 Ilmenau, GermanySIOS Meßtechnik GmbH, Am Vogelherd 46, 98693 Ilmenau, GermanyIMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germanynano analytik GmbH, Ehrenbergstraße 1, 98693 Ilmenau, GermanyProduction and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Gustav-Kirchhoff-Straße 1, 98693 Ilmenau, GermanyThis work deals with various investigations into the accuracy of a newly developed planar nanopositioning machine. This machine, called Nanofabrication Machine 100 (NFM-100), has a positioning range of 100 mm in diameter. To determine the precision, various movement scenarios are performed with the machine table, and the trajectory deviation from the set trajectory is determined. In particular, the focus is on high velocities of up to 20 mm/s. Even at high speeds in the range of several millimetres per second, this machine can impress with its performance and only has a deviation in the nanometre range.https://www.mdpi.com/2076-3417/12/15/7843nanopositioning machineplanar direct drivesub-nanometre precisionmacroscopic working rangehigh speed |
| spellingShingle | Jaqueline Stauffenberg Ingo Ortlepp Johannes Belkner Denis Dontsov Enrico Langlotz Steffen Hesse Ivo Rangelow Eberhard Manske Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm Applied Sciences nanopositioning machine planar direct drive sub-nanometre precision macroscopic working range high speed |
| title | Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm |
| title_full | Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm |
| title_fullStr | Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm |
| title_full_unstemmed | Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm |
| title_short | Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm |
| title_sort | measurement precision of a planar nanopositioning machine with a range of motion of o100 mm |
| topic | nanopositioning machine planar direct drive sub-nanometre precision macroscopic working range high speed |
| url | https://www.mdpi.com/2076-3417/12/15/7843 |
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