Quantum Dot Lasers Directly Grown on 300 mm Si Wafers: Planar and In-Pocket

We report for the first time the direct growth of quantum dot (QD) lasers with electrical pumping on 300 mm Si wafers on both a planar template and in-pocket template for in-plane photonic integration. O-band lasers with five QD layers were grown with molecular beam epitaxy (MBE) in a 300 mm reactor...

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Bibliographic Details
Main Authors: Kaiyin Feng, Chen Shang, Eamonn Hughes, Andrew Clark, Rosalyn Koscica, Peter Ludewig, David Harame, John Bowers
Format: Article
Language:English
Published: MDPI AG 2023-05-01
Series:Photonics
Subjects:
Online Access:https://www.mdpi.com/2304-6732/10/5/534