Small diameter hole profile measuring system and calibration method for contactless sensor with fine fiber probe

We developed a system to measure the internal profile of small diameter hole. The minimum measurable diameter is 0.14 mm and the maximum measureable depth is 2 mm. The system can measure the roundness, straightness, cylindricity, and roughness. The main difficulty to measure the small diameter hole...

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Bibliographic Details
Main Authors: Hideki Morii, Hikaru Masuta, Tatsuro Watanabe, Hiroaki Kimura, Katsufumi Moriyama, Michihiro Sekimoto, Haruka Terakado
Format: Article
Language:English
Published: Elsevier 2021-12-01
Series:Measurement: Sensors
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2665917421001367