Dynamic Force Transducer Calibration Based on Electrostatic Force
Measurements of micro/nano dynamic force transducers (DFTs) in the micro-Newton range are of significant importance in many fields. In this paper, the electrostatic force in the micro-Newton range was used to generate dynamic force to calibrate the DFT, which is traceable to the International System...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8685135/ |