A model of interdiffusion occurring during the formation of thin metal films on single-crystal silicon under conditions of limited solubility of the components
Thin metal films are used in semiconductor and microelectronic devices to form ohmic and non-ohmic contacts to singlecrystal silicon. A common feature of the used Ме–Si systems is the low mutual solubility of elements and the polycrystalline nature of metal films. Solid-phase interactions during th...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Voronezh State University
2022-03-01
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| Series: | Конденсированные среды и межфазные границы |
| Subjects: | |
| Online Access: | https://journals.vsu.ru/kcmf/article/view/9063 |