Design and testing of a novel flexure-based 3-degree-of-freedom elliptical micro/nano-positioning motion stage
In this article, a novel flexure-based 3-degree-of-freedom elliptical micro/nano-positioning motion stage was developed to obtain translation motions along the x, y, and z directions with high working bandwidth. The stage was configurations with a XYZ vertical motion to ensure the crosstalk between...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2017-10-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1177/1687814017725248 |