A Silicon Nanowire Array Biosensor Fabricated by Complementary Metal Oxide Semiconductor Technique for Highly Sensitive and Selective Detection of Serum Carcinoembryonic Antigen

A Silicon Nanowire Array Biosensor Fabricated by Complementary Metal Oxide Semiconductor Technique for Highly Sensitive and Selective Detection of Serum Carcinoembryonic Antigen

In this paper, we present a highly sensitive and selective detection of serum carcinoembryonic antigen (CEA) based on silicon nanowire (SiNW) array device. With the help of traditional microfabrication technology, low-cost and highly controllable SiNW array devices were fabricated. After a series of...

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Bibliographic Details
Main Authors: Xun Yang, Yun Fan, Zhenhua Wu, Chaoran Liu
Format: Article
Language:English
Published: MDPI AG 2019-11-01
Series:Micromachines
Subjects:
carcinoembryonic antigen
silicon nanowire array
highly sensitive
highly selective
low cost
Online Access:https://www.mdpi.com/2072-666X/10/11/764

Internet

https://www.mdpi.com/2072-666X/10/11/764

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