Influence of Different Post Porosification Cleaning Steps on the Parameters of Porous Silicon Layer Stack

Influence of Different Post Porosification Cleaning Steps on the Parameters of Porous Silicon Layer Stack

To grow a defect-free epitaxial silicon wafer (EpiWafer) on a reorganized porous silicon layer stack, the surface must be closed, smooth and particle-free. A post-porosification cleaning step prior to reorganization should significantly reduce the density of (metallic) particles on the surface. In...

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Bibliographic Details
Main Authors: Sarah Sanz, Yves Patrick Botchak Mouafi, Gabriel Micard, Giso Hahn, Barbara Terheiden
Format: Article
Language:English
Published: TIB Open Publishing 2024-02-01
Series:SiliconPV Conference Proceedings
Subjects:
Porous Silicon
Crystalline Silicon
Epitaxial Silicon Wafer
Silicon Surface Cleaning
Online Access:https://www.tib-op.org/ojs/index.php/siliconpv/article/view/882

Internet

https://www.tib-op.org/ojs/index.php/siliconpv/article/view/882

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