Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity

Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity

This work reports the design and opto-mechanical characterization of high velocity comb-drive actuators producing in-plane motion and fabricated using the technology of deep reactive ion etching (DRIE) of silicon-on-insulator (SOI) substrate. The actuators drive vertical mirrors acting on optical be...

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Bibliographic Details
Main Authors: Yomna M. Eltagoury, Mostafa Soliman, Yasser M. Sabry, Mohammed J. Alotaibi, Diaa Khalil
Format: Article
Language:English
Published: MDPI AG 2016-10-01
Series:Micromachines
Subjects:
microelectromechanical system (MEMS) actuator
deep reactive ion etching (DRIE)
optical MEMS
high speed tunable filter
optical fringes
Online Access:http://www.mdpi.com/2072-666X/7/10/188

Internet

http://www.mdpi.com/2072-666X/7/10/188

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