Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity
This work reports the design and opto-mechanical characterization of high velocity comb-drive actuators producing in-plane motion and fabricated using the technology of deep reactive ion etching (DRIE) of silicon-on-insulator (SOI) substrate. The actuators drive vertical mirrors acting on optical be...
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| Format: | Article |
| Language: | English |
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MDPI AG
2016-10-01
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| Series: | Micromachines |
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| Online Access: | http://www.mdpi.com/2072-666X/7/10/188 |
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| author | Yomna M. Eltagoury Mostafa Soliman Yasser M. Sabry Mohammed J. Alotaibi Diaa Khalil |
| author_facet | Yomna M. Eltagoury Mostafa Soliman Yasser M. Sabry Mohammed J. Alotaibi Diaa Khalil |
| author_sort | Yomna M. Eltagoury |
| collection | DOAJ |
| description | This work reports the design and opto-mechanical characterization of high velocity comb-drive actuators producing in-plane motion and fabricated using the technology of deep reactive ion etching (DRIE) of silicon-on-insulator (SOI) substrate. The actuators drive vertical mirrors acting on optical beams propagating in-plane with respect to the substrate. The actuator-mirror device is a fabrication on an SOI wafer with 80 μm etching depth, surface roughness of about 15 nm peak to valley and etching verticality that is better than 0.1 degree. The travel range of the actuators is extracted using an optical method based on optical cavity response and accounting for the diffraction effect. One design achieves a travel range of approximately 9.1 µm at a resonance frequency of approximately 26.1 kHz, while the second design achieves about 2 µm at 93.5 kHz. The two specific designs reported achieve peak velocities of about 1.48 and 1.18 m/s, respectively, which is the highest product of the travel range and frequency for an in-plane microelectromechanical system (MEMS) motion under atmospheric pressure, to the best of the authors’ knowledge. The first design possesses high spring linearity over its travel range with about 350 ppm change in the resonance frequency, while the second design achieves higher resonance frequency on the expense of linearity. The theoretical predications and the experimental results show good agreement. |
| first_indexed | 2024-12-17T10:37:32Z |
| format | Article |
| id | doaj.art-3c38569efd3e43bfab9e1ad5bef0ff30 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-17T10:37:32Z |
| publishDate | 2016-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-3c38569efd3e43bfab9e1ad5bef0ff302022-12-21T21:52:20ZengMDPI AGMicromachines2072-666X2016-10-0171018810.3390/mi7100188mi7100188Electrostatic Comb-Drive Actuator with High In-Plane Translational VelocityYomna M. Eltagoury0Mostafa Soliman1Yasser M. Sabry2Mohammed J. Alotaibi3Diaa Khalil4Faculty of Engineering, Ain-Shams University, 1 Elsarayat St. Abbassia, Cairo 11566, EgyptDepartment of Power Electronics, Electronics Research Institute, Dokki, Giza 12611, EgyptFaculty of Engineering, Ain-Shams University, 1 Elsarayat St. Abbassia, Cairo 11566, EgyptNational Center of nanotechnology research, King Abdulaziz City for Science and Technology, Riyadh 11442, Saudi ArabiaFaculty of Engineering, Ain-Shams University, 1 Elsarayat St. Abbassia, Cairo 11566, EgyptThis work reports the design and opto-mechanical characterization of high velocity comb-drive actuators producing in-plane motion and fabricated using the technology of deep reactive ion etching (DRIE) of silicon-on-insulator (SOI) substrate. The actuators drive vertical mirrors acting on optical beams propagating in-plane with respect to the substrate. The actuator-mirror device is a fabrication on an SOI wafer with 80 μm etching depth, surface roughness of about 15 nm peak to valley and etching verticality that is better than 0.1 degree. The travel range of the actuators is extracted using an optical method based on optical cavity response and accounting for the diffraction effect. One design achieves a travel range of approximately 9.1 µm at a resonance frequency of approximately 26.1 kHz, while the second design achieves about 2 µm at 93.5 kHz. The two specific designs reported achieve peak velocities of about 1.48 and 1.18 m/s, respectively, which is the highest product of the travel range and frequency for an in-plane microelectromechanical system (MEMS) motion under atmospheric pressure, to the best of the authors’ knowledge. The first design possesses high spring linearity over its travel range with about 350 ppm change in the resonance frequency, while the second design achieves higher resonance frequency on the expense of linearity. The theoretical predications and the experimental results show good agreement.http://www.mdpi.com/2072-666X/7/10/188microelectromechanical system (MEMS) actuatordeep reactive ion etching (DRIE)optical MEMShigh speed tunable filteroptical fringes |
| spellingShingle | Yomna M. Eltagoury Mostafa Soliman Yasser M. Sabry Mohammed J. Alotaibi Diaa Khalil Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity Micromachines microelectromechanical system (MEMS) actuator deep reactive ion etching (DRIE) optical MEMS high speed tunable filter optical fringes |
| title | Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity |
| title_full | Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity |
| title_fullStr | Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity |
| title_full_unstemmed | Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity |
| title_short | Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity |
| title_sort | electrostatic comb drive actuator with high in plane translational velocity |
| topic | microelectromechanical system (MEMS) actuator deep reactive ion etching (DRIE) optical MEMS high speed tunable filter optical fringes |
| url | http://www.mdpi.com/2072-666X/7/10/188 |
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