All-Silicon Terahertz Metasurface With Sharp Fano Resonance and Its Sensing Applications
The all silicon terahertz metasurface with sharp Fano resonance and its sensing applications with high Q factor have been investigated. Such metasurface, composed of periodic grooves, can be fabricated by deep silicon etching on high-resistivity silicon. When the refractive index of the sample chang...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9376588/ |